Adaptive shape substrate support system

ABSTRACT

The present method and system features an active compliant pin chuck to hold a substrate, having opposed first and second surfaces, and compensates for non-planarity in one of the surfaces of the substrate. To that end, the support system includes a chuck having a plurality of piezo pins and reference pins, with the piezo pins being coupled to piezo actuators to undergo relative movement with respect to said reference pins. These and other embodiments are discussed more fully below.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present patent application claims priority to U.S. provisionalpatent application No. 60/575,791 entitled ADAPTIVE SHAPE SUBSTRATECHUCK, filed May 28, 2004 and having Mahadevan GanapathiSubramanian andSidlgata V. Sreenivasan listed as inventors and is a divisional patentapplication of U.S. application Ser. No. 11/136,892 filed herewith withattorney docket number PA225N222V145, entitled ADAPTIVE SHAPE SUBSTRATESUPPORT METHOD having Mahadevan GanapathiSubramanian and Sidlgata V.Sreenivasan listed as inventors.

BACKGROUND OF THE INVENTION

The field of invention relates generally to supports for substrates.More particularly, the present invention is directed to a chuck suitedfor use in imprint lithography.

Micro-fabrication involves the fabrication of very small structures,e.g., having features on the order of micro-meters or smaller. One areain which micro-fabrication has had a sizeable impact is in theprocessing of integrated circuits. As the semiconductor processingindustry continues to strive for larger production yields whileincreasing the circuits per unit area formed on a substrate,micro-fabrication becomes increasingly important. Micro-fabricationprovides greater process control while allowing increased reduction ofthe minimum feature dimension of the structures formed. Other areas ofdevelopment in which micro-fabrication have been employed includebiotechnology, optical technology, mechanical systems and the like. Manyof the micro-fabrication techniques involve various processes, includingdeposition, such as chemical vapor deposition, physical vapordeposition, atomic layer deposition and the like, as well as wet and/ordry etching techniques to pattern substrates.

In addition to the standard micro-fabrication techniques, there exists arelatively new and efficient patterning technique referred to as imprintlithography. An exemplary imprint lithography is described in detail innumerous publications, such as U.S. Pat No. 6,873,087 entitled HIGHPRECISION ORIENTATION ALIGNMENT AND GAP CONTROL STAGES FOR IMPRINTLITHOGRAPHY PROCESSES; U.S. Pat. No. 6,842,226, entitled IMPRINTLITHOGRAPHY TEMPLATE COMPRISING ALIGNMENT MARKS; U.S. Pat. No. 6,696,220entitled TEMPLATE FOR ROOM TEMPERATURE, LOW PRESSURE MICRO-ANDNANO-IMPRINT LITHOGRAPHY; and U.S. Pat. No. 6,719,915 entitled STEP ANDFLASH IMPRINT LITHOGRAPHY, all of which are assigned to the assignee ofthe present invention. The fundamental imprint lithography technique asshown in each of the aforementioned published patent applicationsincludes formatting a relief pattern in a polymerizable layer andtransferring the relief pattern into an underlying substrate to form arelief image in the substrate. To that end, a template is employedspaced-apart from the substrate with a formable liquid present betweenthe template and the substrate. The liquid is solidified forming asolidified layer that has a pattern recorded therein that is conformingto a shape of the surface of the template in contact with the liquid.The substrate and the solidified layer are then subjected to processesto transfer into the substrate a relief image that corresponds to thepattern in the solidified layer.

As a result of the aforementioned micro-fabrication techniques, thedemand to ensure the flatness/planarity of substrates beingprocessed/patterned has increased. Typically, it is desired that thesubstrate flatness be greater than the depth of focus requirements ofthe process for typical photolithographic patterning techniques. Thedepth of focus is determined by the wavelength of light, numericalaperture of lenses and other considerations of the lithographyequipment, as well as the post imaging processes. As a result, it isoften desired that the substrate flatness be such that the variation inheight of the region being patterned be no greater than 200 nm. This hasproved challenging, because substrates having a planarization layerdisposed thereon demonstrate height variations over an area of theplanarization layer being processed that is on the order of microns.

Most prior art chucking systems attempt to abrogate the non-planarity ofsubstrates employing vacuum and/or electrostatic forces. Although thisreduces the warp and bow in the substrate over the entire area of thesame, these systems often are unable to attenuate local heightvariations. In addition, the presence of back-side particles exacerbatesnon-planarity problems of substrate.

There is a need, therefore, to provide improved support systems forsubstrates.

SUMMARY OF THE INVENTION

The present system features an active compliant pin chuck to hold asubstrate, having opposed first and second surfaces, and compensates fornon-planarity in one of the surfaces of the substrate. To that end, thesupport system includes a chuck having a plurality of piezo pins andreference pins, with the piezo pins being coupled to piezo actuators toundergo relative movement with respect to said reference pins. These andother embodiments are discussed more fully below.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a simplified plan view of a patterning system in accordancewith the present invention;

FIG. 2 is a perspective view of a chuck and flexures, shown in FIG. 1,in accordance with the present invention;

FIG. 3 is a mechanical schematic of the chuck, flexures and platform,shown in FIG. 1, in accordance with the present invention;

FIG. 4 is a detailed plan view of a substrate support system, shown inFIG. 1, including an active pin chuck in accordance with the presentinvention;

FIG. 5 is a perspective view of a support shown in FIG. 1, in accordancewith the present invention;

FIG. 6 is a detailed plan view of the support shown in FIG. 5; and

FIG. 7 is a flow diagram showing a method of implementing the presentinvention.

DETAILED DESCRIPTION OF THE INVENTION

FIG. 1 depicts a lithographic system 10 in accordance with oneembodiment of the present invention that includes a stage 12 having asupport 14. A substrate 16 is disposed upon support 14. Support 14 ismoveably coupled with respect to a stage 18 through known mechanisms,which, in the present example, are vacuum preloaded air bearings 20.Specifically, stanchions 22 extend from support 14 toward stage 18 withair bearings 20 being coupled between stanchions 22 and stage 18.

Disposed opposite to support 14 is a pattern generation system 24.Pattern generation system 24 may be any known in the art, including aphotolithographic tool typically referred to as a stepper, such as theMA300Plus available from Suss Microtec of Munich Germany, or an imprintlithographic tool, such as the Imprio™ 100 sold by Molecular Imprints,Inc. of Austin, Tex. Image generation system 24 includes a device 26having an original pattern formed therein that is the basis of thepattern to be formed on substrate 12, as well as, a source of actinicenergy and optical subsystems required to pass the actinic energythrough device 26 and impinge upon substrate 16, shown generally asoptical components 28. In a photolithography system, device 26 istypically referred to as being a mask. In an imprint lithography system,device 26 is a patterned region of a template, typically referred to asa mold.

Disposed opposite to device 26 is an active pin chuck 30 that is coupledto a platform 32 via flexures 34. Movement of chuck 30 along aZ-direction is facilitated by vacuum loaded air bearing 36, whichoperates to vary a distance between chuck 30 and stage 18. Air bearings20 facilitate bi-directional movement along each of two orthogonaldirections, e.g., along the X and Y directions. To that end, airbearings 20 operate to selectively allow or prevent relative movementbetween stanchions 22 and stage 18, as well as translational motionbetween support 14 and stage 18. Specifically, when facilitatingmovement between stage 18 and stanchions 22, air bearings increase adistance between chuck 30 so that support 14 is spaced apart therefrom.Upon application of a vacuum to air bearings 20, stanchions are affixedto stage 18 with support 20 resting against chuck 30. It should beunderstood, however, that a z-actuator with a range of motion of 20micro meters may also be used instead of air bearings 20. To facilitateoperation of air bearings 20 and chuck 30, a pump system 25 may be influid communication with support 14, chuck 30, including air bearing 36,and air bearings 20 over lines 27, 29 and 31, respectively. Control ofsystem 10 is achieved by a processor 33 in data communication withvarious components thereof, such as stage 18, air bearings 20,stanchions 22, image generation system 24, pump system 25 and chuck 30.To that end, processor 33 is in data communication with a memory 35storing control software that includes computer readable code.

Referring to FIGS. 1 and 2, flexures 34 are configured to define afour-bar linkage system with flexures 34 comprising two bars of thelinkage, chuck 30 comprising one bar of the linkage and platform 32comprising the final bar of the four-bar linkage. The four-bar linkageminimizes movement of chuck 30 along the X and Y directions when thesame undergoes movement along the Z direction. To that end, flexures 34are fabricated from a body of aluminum, stainless steel or any othersuitable material that minimizes particulate contamination. The body isconfigured to include two spaced-apart coupling portions 38 and 39 and aflexing portion 40 extending therebetween. Coupling portions 38 areattached to a detent 31 of chuck 30 using any suitable means, such asthreaded fasteners not shown. Coupling portions 39 are attached toplatform 32 using any suitable means, such as threaded fasteners notshown.

Coupling portion 38 includes two spaced-apart projections 41 and 42,each of which extends in a plane 43 and 44, respectively, with plane 43being spaced-apart from and extending parallel to plane 44. Couplingportion 39 includes two spaced-apart projections 45 and 46, each ofwhich extends in a plane 47 and 48, respectively, with plane 47 beingspaced-apart from and extending parallel to plane 48. Flexing portion 40extends along a longitudinal axis 49, forming an oblique angle withrespect to planes 43, 44, 47 and 48.

Flexing portion 40 includes recessions 50, 51, 52 and 53, arranged inpairs. Recessions 50 and 52 are disposed on opposing sides of flexingportion 40 and are in superimposition. Recessions 51 and 53 are disposedon opposing sides of flexing portion 40 and are in superimposition.Recessions 50 and 51 are present on a common side of flexing portion 40and are spaced-apart along longitudinal axis 49. Recessions 52 and 53are present on a common side of flexing portion 40 and are spaced-apartalong longitudinal axis 49. The pair of recessions 50 and 52 defines afirst joint of flexing portion 40, and recessions 51 and 53 define asecond joint of flexing portion 40. With both flexures 34 four joints60, 61, 62 and 63 are provided between chuck 30 and platform 12, with afirst pair 60 and 61 of joints being disposed on a side of chuck 30 thatis opposite to the side of chuck 30 upon which pair 62 and 63 of jointsare disposed. With this configuration, movement of chuck in directionsother than the Z direction are constrained, with flexure 34 operating asa resilient member in response to movement of chuck 30 along the Zdirection.

Chuck 30 includes a surface 75 surrounded by a rim 76 that projectsupwardly from a periphery of chuck 30 away from surface 75 so as to havea surface 77 spaced-apart from surface 75 and lying in a plane 78. Rim76 is approximately 1 millimeter wide measured in a direction orthogonalto the Z direction. A plurality of reference pins 79 extend from surface75, terminating in plane P. Surface 75 surrounds a recess 80 having aperiphery 78. Surface 75 is approximately 15 millimeters wide, measuredin a direction that is orthogonal to the Z direction, i.e., as measuredbetween periphery 78 and rim 76. Reference pins 79 arespaced-equidistant from adjacent reference pins 79. Reference pins 79have a square cross-section with an area of approximately 0.25millimeter square and a height, measured along the Z direction that isequal to height of rim 76, approximately 0.3 millimeter. Acenter-to-center spacing between adjacent reference pins 79 isapproximately 1.8 millimeters. Reference pins 79 disposed closest to,e.g., adjacent to, rim 76 are spaced-apart therefrom approximately 1millimeter. Reference pins 79 disposed closest to, e.g., adjacent to,periphery 78 are spaced-apart therefrom approximately 0.5 millimeter.

A plurality of piezo pins 81 is disposed within recess 80. In anexemplary embodiment, 25 to 36 piezo pins 81 are present andspaced-apart equally over a 25 mm×25 mm field area. Specifically, aboundary of the 25 mm×25 mm field bisects piezo pins 81 located adjacentto periphery 78, i.e., piezo pins 80 located closest to periphery 78.Spacing between the reference pin 79 and piezo pin 81 closest thereto isapproximately 2 millimeters. Center-to-center spacing of adjacent piezopins 81 is approximately 4 millimeters.

Piezo pins 81 are attached to one or more actuators 82. Piezo actuators82 are selected to operate when the 25 mm×25 mm field area is subjectedto a load of approximately 100 Newtons and provide piezo pins 81 with 9micrometers movement. Piezo pins 81 are designed to have a maximumstrain value of 0.15%, a length of approximately 6 millimeters and asquare cross-sectional area of 3 square millimeters. As a result, piezopins 81 are formed from a ceramic material. The error due to theapplication of the load L on pins of unequal lengths is limited to 3nanometers in the present example so as to satisfy the followingrelation:L dl/E A≦3 nm  (1)where E is the Young's modulus of the piezo pins 81, A is thecross-sectional area of the same and dl is the difference between thelength of the short piezo pin 81 compared with the longest piezo pin 81.The maximum value of dl is 5 micrometers that provides r≧0.5 millimeter.It was determined that a desired stiffness for piezo pins 81 would be noless than approximately 32.986×10⁶ N/m. Piezo pins 81, of the presentexample, were found to have a desired stiffness of approximately 100×10⁶N/m. Each piezo pins 81 are capped with stainless steelhemispherical-shaped caps 83. Caps 83 are attached to piezo pins 81using non-conductive epoxy. Caps 83, as well as reference pins 79, areplanarized so that the variation in height over the total area definedby the upper surfaces of piezo pins 81 and reference pins 79 varies nogreater than 100 nm. To minimize creep, hysteresis and static drift inpiezo actuators 82, capacitive sensors or strain gauge sensors may beprovided in a closed loop control configuration. Exemplary actuatorsemployed in the present invention are available under part number CMAP3from Adaptronics, Inc. of Troy, N.Y. A 25 channel controller 84 soldunder part number LA-75A from Adaptronics, Inc. is in signalcommunication with actuators 82 to control operation of the same.

Referring to FIG. 5, support 14 is a plate of stainless steel that isapproximately 0.5 millimeter thick and 250 millimeters square. A surface90 of support 14 is surrounded by a rim 91, extending therefrom todefine a circular region. The circular region is covered with pins 92.Pins 92 have a diameter of 0.5 millimeter, measured orthogonally to theZ direction, a height of 0.3 millimeter, measured along the Z direction.Pin-to-pin spacing is approximately 2 millimeters, measured along the Xand Y directions. A plurality of vacuum seals 93 is provided at aperiphery of region 90. The flexural rigidity of support 14 is designedto match the structural rigidity of wafer 16.

Referring to both FIGS. 5 and 6, each vacuum seal 93 includes astand-off 95 having a throughway 96 extending from an aperture 97 formedin region 90 and terminating in an opening 98 in stand-off 95, disposedopposite to aperture 97. Stand-off 95 may be 8 millimeters or longer.Each of vacuum seals 93 are placed in fluid communication with a pumpsystem 25 through conduits 27 to control the velocity and direction offluid flow through apertures 97. As a result, apertures 97 are arrangedin region 90 so that substrate 16 rests thereon and may be vacuumchucked to support 14. The advantages of support 14 are manifold. Forexample, it is believed that by resting substrate 16 on support 14,substrate 16 rests against a surface similar to a conventional pin typechuck despite the presence of pizeo pins 81. In other words, support 14allows center-to-center spacing of pins in contact with substrate 16 tobe independent of the center-to-center spacing of pins of chuck 30. Thisis particularly advantageous in light of the arrangement and size ofpiezo pins 81. As a result, the point contact effectuated by piezo pins81 results in variations to substrate 16 that are smooth and continuous.This facilitates sub-100 nanometer variations in substrate 16 surfacetopology while minimizing the number of piezo pins 81 required for thesame. Additionally, support 14, being fabricated from stainless steel,avoids particulate generation that might occur were pins 18 to contactsubstrate 16 directly. Support 14 may also be formed from numerous othermaterials, such as silicon, fused silica, silicon carbide and the like.

In operation, substrate 16 is chucked onto support 14 at step 200 byapplication of vacuum through throughways 97. At step 202 a surface ofsubstrate 16 facing away from support 14 is analyzed using standardtechniques to determine topography of the same that is stored in memory35, i.e., mapped into memory 35 as an interpolative function of thetopography. For example, laser interferometry may be employed todetermine a shape of the requisite surface of substrate 16. At step 204support 14, with substrate 16 attached thereto, is chucked to chuck 30by applying vacuum to recess 80 vis-a-vis throughway 99 that is in fluidcommunication with pump system 25. In this manner, support 14 is chuckedonto chuck 30 by forming a seal against rim 76 and application of avacuum by pump system 25 in fluid communication with chuck 30 throughlines 101. As a result, support 14 rests against rim 76 and referencepins 79. It is desired that chuck 30 pre-stress piezo pins 81 toincrease the operational life of piezo actuators 82, e.g., placeactuators 82 in a state compression. To that end, rim 76 forms a sealwith support 14 thereon to define a chamber between surface 75 andsupport 14. Specifically, evacuation of recess 80 holds support 14firmly against rim 76, with substrate 16 being held firmly against rim91. As a result, substrate 16 is fixedly attached to chuck 30.

When substrate 16 is fixedly attached to chuck 30, vis-a-vis support 12,a profile of a surface of substrate 16, facing away from chuck 30, ismodified at step 206. Specifically, a sub-portion of the informationconcerning the topology of substrate 16 stored in memory 35 is analyzedby processor 33. This sub-portion of information corresponds to theprofile of the surface that is in superimposition with the 25 mm×25 mmfield, in which piezo pins 81 lie. Processor 33, operating on thisinformation and a routine stored therein, generates control signals thatare sent to controller 84. The algorithms included in the routine andstored in memory 35 to modify the profile of the surface of substrate 16are discussed more fully below. In response to the a control signals,controller 84 causes piezo pins 81 to move and provide the surface ofsubstrate 16 with a desired profile. Specifically, actuators 82 receivesignals from controller 84 to vary a height of piezo pins 82, measuredwith respect to reference pins 79, to minimize any non-planaritymeasured in the profile of the surface of the processing region.Actuators 82 generate movement of piezo pins 81 causing deformation ofsupport 14 in a portion thereof in superimposition with the 25 mm×25 mmfield. In this manner, the situs and magnitude of one or more pointcontacts are made by piezo pins 81 to provide the region of surface ofsubstrate 16 that is to be patterned to have variations in height nogreater than 100 nanometers. After obtaining the desired profile of thesurface, at step 208 a region is exposed to actinic energy infurtherance of patterning the same in accordance with the patterningtechnology employed, e.g., photolithography or imprint lithography.After exposing the region to actinic energy, at step 210 it isdetermined whether there remain any additional regions of substrate 16to be exposed to actinic energy. If not, the method ends at step 212 andif so, the process continues at step 214 wherein the next region,substrate 16, is placed in superimposition with patterning device 26.The process continues at step 206.

With the present invention, chuck 30 can be positioned underneath everyfield of substrate 16 including end fields and hence provides forend-field correction. A distinguishing feature of the adaptive shapesubstrate chuck is its step and repeat mode of substrate flatness errorcorrection. Support 14 provides support to substrate 16 and provides asmooth compensation profile driven by actuators 82. By movement ofsubstrate 16 by X-Y stage 18, actuators 82 may be selectively positionedin superimposition with regions of substrate 16 being patterned. Thus itfollows a step and repeat mode of correction. This arrangement helps tominimize the number of actuators to 25 or 36 and, at the same time,provides better than 100 nm flatness accuracy.

To determine the profile of the surface of substrate 16, data fromseveral different regions of the surface containing profile informationare obtained, which is referred to as datum points. The datum points arechosen to lie on the surface of processing region, and the totality ofthe datum points is representative of the topography of that surface. Inthe present example, 32 datum points are obtained. For every 6.25millimeters of movement along the X-direction, there is a datum pointrepresenting every ⅛th of a field in the Y-direction and vice versa. Itis believed that this arrangement provides an accurate representation ofthe surface of processing region with a minimum number of datum points.Information contained in the datum points is operated on by processor 33to generate control signals to actuators 82 to compensate fornon-planarity present in the surface. Specifically, flatness deviationover the area of the processing region is determined by comparison withthe information contained in the datum points with respect to areference point, referred to as PNT0. In response to the signals,actuators 82 move piezo pins 81 so as to minimize the non-planarity inthe surface. To that end, one of several control algorithms may beemployed and stored in memory as computer readable code, with PNT0 beingconsidered the origin of reference in the control algorithms.

For example, a direct compensation algorithm may be employed in whichflatness deviation is measured at a situs on the surface of theprocessing region that is in superimposition with one of the piezo pins81. In this fashion, the number of datum points would be commensuratewith the number of piezo pins 82 present in chuck 30 so that each datumpoint would contain information concerning the surface that is insuperimposition with one of the piezo pins 81. A benefit of thisalgorithm is that it is believed to minimize the computational burdennecessary to obtain desired control signals.

Alternatively, surface fitting algorithms may be employed. One suchalgorithm is known as an algebraic surface fitting (ASF) algorithm. TheASF algorithm determines flatness deviations at the datum points, aswell as the complementary values to the same. In one example of the ASFalgorithmic implementation, the surface of the processing region isrepresented by a 4th order polynomial equation as follows:

$\begin{matrix}{{Z\left( {x,y} \right)} = {A_{0} + {A_{1}x} + {A_{2}y} + {A_{3}x^{2}} + {A_{4}{xy}} + {A_{5}y^{2}} + {A_{6}x^{3}} + {A_{7}x^{2}y} + {A_{8}{xy}^{2}} + {A_{9}y^{3}} + {A_{10}x^{4}} + {A_{11}x^{3}y} + {A_{12}x^{2}y^{2}} + {A_{13}{xy}^{3}} + {A_{14}y^{4}}}} & (2)\end{matrix}$The coefficients A_(i) are determined using x, y and z values known suchas, 15 datum points. Upon determining Z(x,y), actuators 82 move piezopins 81 so that caps 83 allow the surface opposite to the surface beingcontacted by caps 83 lie on the surface defined Z(x,y). To improve therepresentation the surface of processing region by equation (2), rootmean square (RMS) error values may be determined for the datum pointsand equation (2) may be modified to compensate for these RMS errorvalues.

Another surface fitting algorithm is known as a B-spline surface fit.B-spline surfaces have the following properties: (i) continuity of thesurface in each parametric direction is two less than the number ofdefining polygon vertices in that direction; and (ii) the surface issmooth and lies within the convex hull of the defining polygon net. TheB-spline surface fit may be defined as follows:

$\begin{matrix}{{Q\left( {u,w} \right)} = {\sum\limits_{i = 1}^{n + 1}{\sum\limits_{j = 1}^{m + 1}{B_{i,j}{N_{i,k}(u)}{M_{j,l}(w)}}}}} & (3)\end{matrix}$where N_(i,k)(u) and M_(j,l)(w) are the B-spline basis functions in thebi parametric u and w directions, respectively. The basis functionN_(i,k)(u)is defined as follows:

$\begin{matrix}{{N_{i,1}(u)} = \left\{ {{\begin{matrix}1 & {{{if}\mspace{14mu} x_{i}} \leq u < x_{i + 1}} \\0 & {otherwise}\end{matrix}{N_{i,k}(u)}} = {\frac{\left( {u - x_{i}} \right){N_{i,{k - 1}}(u)}}{x_{i + k - 1} - x_{i}} + \frac{\left( {x_{i + k} - u} \right){N_{{i + 1},{k - 1}}(u)}}{x_{i + k} - x_{i + 1}}}} \right.} & (4)\end{matrix}$and the basis function M_(j,l)(w) is defined as follows:

$\begin{matrix}{{M_{j,1}(w)} = \left\{ {{\begin{matrix}1 & {{{if}\mspace{14mu} y_{j}} \leq w < y_{j + 1}} \\0 & {otherwise}\end{matrix}{M_{j,l}(w)}} = {\frac{\left( {w - y_{j}} \right){M_{j,{l - 1}}(w)}}{y_{j + l - 1} - y_{j}} + \frac{\left( {y_{j + l} - w} \right){M_{{j + 1},{l - 1}}(w)}}{y_{j + l} - y_{j + 1}}}} \right.} & (5)\end{matrix}$where x_(i) and y_(j) are elements of knot vectors[ ]. B_(i,j) are thevertices of a defining polygon net.

Given a known set of data on a surface, the defining polygon net for aB-spline surface that best interpolates the data may be determined. Forexample, the basis functions N_(i,k)(u) and M_(j,l)(w) may be determinedfor a known order and a known number of defining polygon net verticesprovided that the values of u,w are known at the surface data points.Each known surface data point provides a linear equation in the unknowndefining net vertices B_(i,j) as shown as follows:

$\begin{matrix}{{D_{1,1}\left( {u_{1},w_{1}} \right)} = {{{N_{1,k}\left( u_{1} \right)}\left\lbrack {{{M_{1,l}\left( w_{1} \right)}B_{1,1}} + {{M_{2,l}\left( w_{1} \right)}B_{1,2}} + \ldots + {{M_{{m + 1},l}\left( w_{1} \right)}B_{1,{m + 1}}}} \right\rbrack} + {{N_{{n + 1},k}\left( u_{1} \right)}{\quad\left\lbrack {{{M_{1,l}\left( w_{1} \right)}B_{{n + 1},1}} + {{M_{2,l}\left( w_{1} \right)}B_{{n + 1},2}} + \ldots + {{M_{{m + 1},l}\left( w_{1} \right)}B_{{n + 1},{m + 1}}}} \right\rbrack}}}} & (6)\end{matrix}$where r×s is a topologically rectangular set of data 2≦k≦n+1≦r and2≦l≦m+1≦s. In matrix form equation (6) may be expressed as follows:[D]=[C][B]  (7)where C_(i,j)=N_(i,k)M_(j,l). From equation (7), the defining polygonnet is obtained as follows:[B]=[C]^(T)[C]]⁻¹[C]^(T)[D]  (8)Once the matrix B is obtained, the values of Q on a conjugate surface atpiezo pins 81 are obtained using equation (3). Actuators 82 are operatedaccordingly in order to locate piezo pins 81 on the B-spline surface.

Another algorithm that may be employed to produce control signals foractuators 82 is referred to as a linear superimposable algorithm (LSA).The LSA is based upon the linear superposition of the movement caused byindividual actuators 82. Specifically, the relationship between thechanges in position of the datum points to individual actuators 82 isscalable and additive. In the present example, the change in position ofthe datum points due to 1 millimeter of movement of piezo pins 81 inresponse to activation of actuators 82 is determined for a typicalsubstrate 16 thickness of 0.5 mm when positioned on chuck 30. The changein positions of datum point are referred to as the “mode shapes”. Inthis fashion, the LSA expresses the conjugate profile of the processingsurface as mode shapes. The movements of the datum points are linearsuperimposable, because actuators 82 with non-zero actuation are incontact with support 14. As a result, the surface correction reduces toan optimization problem with displacements of piezo pins 81 as thevariables, constraints on piezo pins 81 movement to take into accountthat the same is in contact with support 14, that the movement is withinthe motion range (<9 mm), and to account for the resolution of theactuators (1 nm).

The present invention provides all the salient aspects of reduced areaassociated with a pin type chuck, as support 14 functions as the same.As a result, the present invention may be incorporated as a stand-alonesubstrate holding device to support and planarize a substrate.Alternatively, the present invention may be retrofitted onto existingchucking systems to improve the operational performance of the same. Oneof the benefits realized by the present invention is improved planarityof substrates to better than 100 nm through the use of piezoelectricactuators with nanometer resolution. Additionally, the flatness controlmay be independent of the source of the substrate flatness error, e.g.,backside particles or local thickness variations. Additionally thepresent invention also facilitates compensation for substrate edgeeffects.

The embodiments of the present invention described above are exemplary.Many changes and modifications may be made to the disclosure recitedabove, while remaining within the scope of the invention. Rather, thepresent invention may be employed to control the planarity of asubstrate during any processing in addition to patterning, such as,chemical mechanical polishing/planarization. The invention may beemployed outside of semiconductor substrate processing. For example, theinvention may be employed to control the planarity of any suitablesubstrate, such as fused lenses made from silicon, fused silica, carbonand the like. The scope of the invention should, therefore, not belimited by the above description, but instead should be determined withreference to the appended claims along with their full scope ofequivalents.

1. A support system for a substrate, said support system comprising: achuck having a plurality of piezo pins and reference pins, with saidpiezo pins being coupled to piezo actuators to undergo relative movementwith respect to said reference pins; and a support resting upon saidreference with a region of said support being in superimposition withsaid piezo pins.
 2. The support system as recited in claim 1 furtherincluding a vacuum system in fluid communication with said chuck toselectively vacuum chuck said support to said chuck.
 3. The supportsystem as recited in claim 1 further including a stage system tofacilitate movement along two orthogonal directions with said piezoactuators coupled to facilitate movement of said piezo pins along anadditional direction, orthogonal to said two orthogonal directions. 4.The support system as recited in claim 3 further including a flexuresystem, with said chuck being coupled to said stage system through saidflexure system, with said flexure system constraining movement of saidchuck along said additional direction.
 5. The support system as recitedin claim 1 further including a processor and a memory in datacommunication with said processor, with said processor being in datacommunications with said actuators to generate control signals therefor.